Biocompatible Hermetic Encapsulation of PMUTs for Usage in Implantable Medical Devices

Afshari Savojbolagh, EsmaeilEsmaeilAfshari SavojbolaghHouri, SamerSamerHouriVerplancke, RikRikVerplanckeRochus, VeroniqueVeroniqueRochusCauwe, MaartenMaartenCauweGijsenbergh, PieterPieterGijsenberghRottenberg, XavierXavierRottenbergOp de Beeck, MaaikeMaaikeOp de Beeck2025-06-172025-04-032025-06-172024979-8-3503-7191-81099-4734WOS:001428150100405https://imec-publications.be/handle/20.500.12860/45489Biocompatible Hermetic Encapsulation of PMUTs for Usage in Implantable Medical DevicesProceedings paper10.1109/UFFC-JS60046.2024.10793944979-8-3503-7190-1WOS:001428150100405MICROMACHINED ULTRASONIC TRANSDUCERSARRAYS