Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists

Straham, JeffreyJeffreyStrahamAdams, JacobJacobAdamsJen, Wei-LunWei-LunJenVanleenhove, AnjaAnjaVanleenhoveNeikirk, ColinColinNeikirkRochelle, TimothyTimothyRochelleGronheid, RoelRoelGronheidWillson, GrantGrantWillson2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16276Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resistsProceedings paper