Low-Frequency Noise Characterization of BEOL Metal-Insulator-Metal Capacitors

Giusi, G.G.GiusiSaini, NishantNishantSainiCroes, KristofKristofCroesCiofi, IvanIvanCiofiScandurra, G.G.ScandurraCiofi, C.C.CiofiTierno, DavideDavideTierno2025-04-132025-04-132025-APR0018-9383WOS:001457760300030https://imec-publications.be/handle/20.500.12860/45529Low-Frequency Noise Characterization of BEOL Metal-Insulator-Metal CapacitorsJournal article10.1109/TED.2025.3542748WOS:001457760300030WORK FUNCTIONGATE ELECTRODECHALLENGESFILM