Spampinato, ValentinaValentinaSpampinatoDialameh, MasoudMasoudDialamehFranquet, AlexisAlexisFranquetFleischmann, ClaudiaClaudiaFleischmannConard, ThierryThierryConardvan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-292021-10-2920200003-2700https://imec-publications.be/handle/20.500.12860/35997A correlative ToF-SIMS/SPM methodology for probing 3D devicesJournal articlehttps://doi.org/10.1021/acs.analchem.0c02406