Dellaert, DriesDriesDellaertDoutreloigne, JanJanDoutreloigne2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25187Latching MEMS switch matrices for telecommunication applicationsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7103079