Claeys, CorCorClaeysRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramArimura, HiroakiHiroakiArimuraHoriguchi, NaotoNaotoHoriguchiSimoen, EddyEddySimoen2021-10-272021-10-2720192162-8769https://imec-publications.be/handle/20.500.12860/32720Low-frequency noise assessment of work function engineering cap layers in high-k gate stacksJournal articlehttp://jss.ecsdl.org/content/8/2/N25.abstract