Line edge roughness measurement technique of fingerprint in block copolymer thin film

Isawa, MikiMikiIsawaSakai, KeiKeiSakaiRincon Delgadillo, PaulinaPaulinaRincon DelgadilloGronheid, RoelRoelGronheidYoshida, HiroshiHiroshiYoshida2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22527Line edge roughness measurement technique of fingerprint in block copolymer thin filmProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1678005