Vlekken, J.J.VlekkenCroes, KrisKrisCroesD'Olieslaeger, MarcMarcD'OlieslaegerKnuyt, G.G.KnuytVandervorst, WilfriedWilfriedVandervorstDe Schepper, PatrickPatrickDe Schepper2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2295Investigation of the correlation between parameters defining the state of sputtered particlesOral presentation