Tomorrow's pitches on today's 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holes

Franke, Joern-HolgerJoern-HolgerFrankeBekaert, JoostJoostBekaertWiaux, VincentVincentWiauxNair, Vineet VijayakrishnanVineet VijayakrishnanNairHendrickx, EricEricHendrickxDavydova, NataliaNataliaDavydovavan Dijk, AndreAndrevan DijkWang, ErikErikWangMaslow, MarkMarkMaslow2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35136Tomorrow's pitches on today's 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holesProceedings paperhttps://doi.org/10.1117/12.2573073