EXLE-SIMS: dramatically enhanced accuracy for dose loss metrology

Vandervorst, WilfriedWilfriedVandervorstVos, RitaRitaVosSalima, A.J.A.J.SalimaMerkulov, A.A.MerkulovNakajima, K.K.NakajimaKimura, K.K.Kimura2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14710EXLE-SIMS: dramatically enhanced accuracy for dose loss metrologyProceedings paper