Mertens, PaulPaulMertensJacobs, LeonLeonJacobsGoris, KarenKarenGorisKenis, KarineKarineKenisLoewenstein, LeeLeeLoewensteinTeerlinck, IvoIvoTeerlinckBearda, TwanTwanBeardaDe Gendt, StefanStefanDe GendtVos, RitaRitaVosHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3676Distribution of metal contamination in SiO2/Si systemsMeeting abstract