A method for detecting sub-wavelength features by means of a multimode waveguide and a mode splitting photonic IC

Fransoo, FrederikFrederikFransooVan Thourhout, D.D.Van ThourhoutVan Landschoot, LiesbetLiesbetVan LandschootVerbiest, A.A.VerbiestVan Parys, WouterWouterVan ParysVan Daele, PeterPeterVan DaeleBaets, RoelRoelBaets2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6331A method for detecting sub-wavelength features by means of a multimode waveguide and a mode splitting photonic ICProceedings paper