Challenges for structural stability of ultra-low-k based interconnects

Iacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaVandevelde, BartBartVandeveldeTravaly, YoussefYoussefTravalyMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9081Challenges for structural stability of ultra-low-k based interconnectsJournal article