Differential interference contrast microscopy of defects in As-grown and annealed Si wafers

Trauwaert, Marie-AstridMarie-AstridTrauwaertVanhellemont, JanJanVanhellemontLambert, U.U.LambertGräf, D.D.GräfKenis, KarineKarineKenisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2184Differential interference contrast microscopy of defects in As-grown and annealed Si wafersProceedings paper