Dictus, DriesDriesDictusShamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe GendtVinckier, ChrisChrisVinckier2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/17026Impact of metal etch residues on etch species density and uniformityJournal article