Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND

Tierno, DavideDavideTiernoArreghini, AntonioAntonioArreghiniLesniewska, AlicjaAlicjaLesniewskaJeong, YongbinYongbinJeongvan der Veen, MarleenMarleenvan der VeenStiers, JimmyJimmyStiersBazzazian, NinaNinaBazzazianCiofi, IvanIvanCiofiVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2024-08-162024-08-162024979-8-3503-6977-91541-7026WOS:001229691100007https://imec-publications.be/handle/20.500.12860/44317Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NANDProceedings paper10.1109/IRPS48228.2024.10529305979-8-3503-6976-2WOS:001229691100007