Lee, Se-WonSe-WonLeeKim, Moo-SungMoo-SungKimLee, ChangwonChangwonLeeIvanov, SergeiSergeiIvanovDelabie, AnneliesAnneliesDelabievan der Veen, MarleenMarleenvan der Veen2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35447Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patternsMeeting abstract