Wet etching of low loss lithium tantalate waveguides and heterogeneous lithium tantalate integration

Nenezic, PatrickPatrickNenezicWithouck, JorikJorikWithouckVandekerckhove, TomTomVandekerckhoveNiels, MargotMargotNielsBonito Oliva, ValeriaValeriaBonito OlivaBillet, MaximilienMaximilienBilletKuyken, BartBartKuyken2026-07-152026-07-152025979-8-3315-2560-62374-0140https://imec-publications.be/handle/20.500.12860/59849A new wet etching process is developed for lithium tantalate waveguide fabrication and propagation losses are measured. With such process, low loss structures can be fabricated without requiring etching machinery. Furthermore, it opens possibilities in realizing heterogeneously integrated lithium tantalate modulators using waveguides.engWet etching of low loss lithium tantalate waveguides and heterogeneous lithium tantalate integrationProceedings paper10.1109/ipc65510.2025.11282158WOS:001789451200102