Distributed dielectric charging and its impact on RF MEMS devices

Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-152021-10-152004-10https://imec-publications.be/handle/20.500.12860/9536Distributed dielectric charging and its impact on RF MEMS devicesProceedings paper