Compact and low power silicon photonic components based on MEMS

Gylfason, Kristinn B.Kristinn B.GylfasonEdinger, PierrePierreEdingerErrando-Herranz, CarlosCarlosErrando-HerranzTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariQuack, NielsNielsQuackVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaerts2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36749Compact and low power silicon photonic components based on MEMSProceedings paperhttps://doi.org/10.1117/12.2582947