Kobayashi, DaisukeDaisukeKobayashiBargallo Gonzalez, MireiaMireiaBargallo GonzalezRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyHirose, KazuyukiKazuyukiHiroseSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-182010-10https://imec-publications.be/handle/20.500.12860/17389Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layersMeeting abstract