Jourdain, AnneAnneJourdainDe Vos, JoeriJoeriDe VosInoue, FumihiroFumihiroInoueRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneWalsby, EdwardEdwardWalsbyPatel, JashJashPatelAnsell, OliverOliverAnsellHopkins, JanetJanetHopkinsAshraf, HumaHumaAshrafThomas, DaveDaveThomas2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26791Extreme wafer thinning optimization for via-last applicationsProceedings paperhttp://ieeexplore.ieee.org/document/7970028/