Ong, PatrickPatrickOngLan, YongqingYongqingLanNoller, BastianBastianNollerGillot, ChristopheChristopheGillotUsman Ibrahim, AnsarAnsarUsman IbrahimLauter, MichaelMichaelLauterGolzarian, RezaRezaGolzarianLi, YuzhuoYuzhuoLi2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21225Ge, III/V Materials CMPOral presentation