Zhou, ChunChunZhouKurosawa, TsuyoshiTsuyoshiKurosawaDazai, TakahiroTakahiroDazaiDoise, JanJanDoiseRen, JiaxingJiaxingRenBezik, CodyCodyBezikSagal-Peretz, TamarTamarSagal-PeretzYamazaki, AkioshiAkioshiYamazakiGronheid, RoelRoelGronheidRincon Delgadillo, PaulinaPaulinaRincon Delgadillode Pablo, JuanJuande PabloNealey, Paul S.Paul S.Nealey2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32381Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensionsProceedings paperhttps://doi.org/10.1117/12.2297461