Tuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental Approach

Dorney, KevinKevinDorneyNerke, EvaEvaNerkeRook, KatrinaKatrinaRookChecco, AntonioAntonioCheccoKrasnov, VitalyVitalyKrasnovNalin Mehta, AnkitAnkitNalin MehtaImpagnatiello, AndreaAndreaImpagnatielloKlostermann, UlrichUlrichKlostermannDawes, AndyAndyDawesWelling, UlrichUlrichWellingHoppe, WolfgangWolfgangHoppeLee, MengMengLeePhilipsen, VickyVickyPhilipsen2026-03-312026-03-312025978-1-5106-9320-30277-786Xhttps://imec-publications.be/handle/20.500.12860/58982engTuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental ApproachProceedings paper10.1117/12.3071890WOS:001674167600034