Graphene functionalization as seed for dielectric passivation

Wyndaele, Pieter-JanPieter-JanWyndaelede Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Gendt, StefanStefanDe Gendt2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36361Graphene functionalization as seed for dielectric passivationMeeting abstracthttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/143475