Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature

Lopaev, DDLopaevRakhimova, TTRakhimovaMankelevich, YYMankelevichKurchikov, K.K.KurchikovZyryanov, S.S.ZyryanovZotovich, A.A.ZotovichBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25575Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperatureMeeting abstracthttp://pesm-conference.org/files/2015_abstractbook.pdf