Computational nanometrology of line edge roughness: recent challenges and advances

Constantoudis, VassiliosVassiliosConstantoudisPapavieros, GeorgeGeorgePapavierosLorusso, GianGianLorussoGogolides, EvangelosEvangelosGogolides2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28061Computational nanometrology of line edge roughness: recent challenges and advancesProceedings paper