In situ bow monitoring: towards uniform blue and green InGaN/GaN quantum well structures grown on 100mm sapphire substrates by MOVPE

Cheng, KaiKaiChengDegroote, StefanStefanDegrooteLeys, MaartenMaartenLeysZhang, LiyangLiyangZhangDerluyn, JoffJoffDerluynGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-182021-10-1820101610-1634https://imec-publications.be/handle/20.500.12860/16853In situ bow monitoring: towards uniform blue and green InGaN/GaN quantum well structures grown on 100mm sapphire substrates by MOVPEJournal article