Demuynck, StevenStevenDemuynckHuffman, CraigCraigHuffmanClaes, MartineMartineClaesSuhard, SamuelSamuelSuhardVersluijs, JankoJankoVersluijsVolders, HennyHennyVoldersHeylen, NancyNancyHeylenKellens, KristofKristofKellensCroes, KristofKristofCroesStruyf, HerbertHerbertStruyfVereecke, GuyGuyVereeckeVerdonck, PatrickPatrickVerdonckDe Roest, DavidDavidDe RoestBeynet, JulienJulienBeynetSprey, HesselHesselSpreyBeyer, GeraldGeraldBeyer2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15221Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HMProceedings paper