Sejpal, RajivRajivSejpalPhilipsen, VickyVickyPhilipsenArmeanu, AnaAnaArmeanuWei, Chi-IChi-IWeiGillijns, WernerWernerGillijnsLafferty, NealNealLaffertyFenger, GermainGermainFengerHendrickx, EricEricHendrickx2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33961Exploring alternative EUV mask absorber for iN5 self-aligned block and contact layersProceedings paperhttps://doi.org/10.1117/12.2536892