Passivation challenges with Ge and III/V devices

Sioncke, SonjaSonjaSionckeLin, DennisDennisLinNyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabieThean, AaronAaronTheanHoriguchi, NaotoNaotoHoriguchiStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymax2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21522Passivation challenges with Ge and III/V devicesProceedings paper