Monte Carlo simulation of the formation of M2+ - molecular ions sputtered from metallic materials

Vlekken, J.J.VlekkenWu, Ting-DiTing-DiWuD'Olieslaeger, MarcMarcD'OlieslaegerKnuyt, G.G.KnuytVandervorst, WilfriedWilfriedVandervorstDe Schepper, LucLucDe Schepper2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3131Monte Carlo simulation of the formation of M2+ - molecular ions sputtered from metallic materialsProceedings paper