Claeys, CorCorClaeysBargallo Gonzalez, MireiaMireiaBargallo GonzalezEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenBender, HugoHugoBenderSchreutelkamp, RobRobSchreutelkampWashington, L.L.WashingtonNouri, F.F.NouriSimoen, EddyEddySimoen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11874Leakage current control in recessed SiGe source/drain junctionsJournal article