Li, YanluYanluLiDieussaert, EmielEmielDieussaertBaets, RoelRoelBaets2023-06-202023-06-202023-06-2020221424-8220WOS:000824579400001https://imec-publications.be/handle/20.500.12860/41819Miniaturization of Laser Doppler Vibrometers-A ReviewJournal article review10.3390/s22134735WOS:000824579400001SILICON-ON-INSULATORSELF-PHASE-MODULATIONPOLYMER WAVE-GUIDEHETERODYNE INTERFEROMETERINTEGRATED-OPTICSFEEDBACK INTERFEROMETRYFREQUENCY TRANSLATIONDISPLACEMENT SENSORGRATING COUPLERSPHOTONICSMEDLINE:35808231