Lithography for patterning inside through-Si vias

Pham, NgaNgaPhamSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanMajeed, BivraghBivraghMajeedDe Moor, PietPietDe MoorBaert, KrisKrisBaertSwinnen, BartBartSwinnenRuythooren, WouterWouterRuythooren2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12701Lithography for patterning inside through-Si viasProceedings paper