Impact of line-edge roughness on resistance and capacitance of scaled interconnects

Stucchi, MicheleMicheleStucchiBamal, MandeepMandeepBamalMaex, KarenKarenMaex2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12957Impact of line-edge roughness on resistance and capacitance of scaled interconnectsJournal article