Mailfert, JulienJulienMailfertZuniga, ChristianChristianZunigaPhilipsen, VickyVickyPhilipsenAdam, KonstantinosKonstantinosAdamLam, MichaelMichaelLamWord, JamesJamesWordHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenbergheSmith, BruceBruceSmith2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/210773D Mask modeling for EUV lithographyProceedings paper