Zhang, XunyuanXunyuanZhangGillot, ChristopheChristopheGillotZhao, LarryLarryZhaoRyan, E. ToddE. ToddRyanWu, ChenChenWu2021-10-232021-10-2320152162-8769https://imec-publications.be/handle/20.500.12860/26243The impact of PEALD TaN barrier processes on different ultra low-k dielectricsJournal articlehttp://jss.ecsdl.org/content/4/12/N160.abstract