Probing of large-array, fine-pitch microbumps for 3D ICs

Fodor, FerencFerencFodorDe Wachter, BartBartDe WachterMarinissen, Erik JanErik JanMarinissenKiesewetter, JoergJoergKiesewetterSmith, KenKenSmith2021-10-242021-10-242017-05https://imec-publications.be/handle/20.500.12860/28344Probing of large-array, fine-pitch microbumps for 3D ICsProceedings paperhttp://sine.ni.com/cs/app/doc/p/id/cs-17384#