CMOS-compatible high-power low-leakage AlGaN/GaN MISHEMT on silicon substrate

Van Hove, MarleenMarleenVan HoveBoulay, SanaeSanaeBoulayBahl, SandeepSandeepBahlStoffels, SteveSteveStoffelsKang, XuanwuXuanwuKangWellekens, DirkDirkWellekensGeens, KarenKarenGeensDelabie, AnneliesAnneliesDelabieDecoutere, StefaanStefaanDecoutere2021-10-202021-10-2020120741-3106https://imec-publications.be/handle/20.500.12860/21708CMOS-compatible high-power low-leakage AlGaN/GaN MISHEMT on silicon substrateJournal article