Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloBekaert, JoostJoostBekaertVandenbroeck, NadiaNadiaVandenbroeckGronheid, RoelRoelGronheidChan, BTBTChanvan der Veen, MarleenMarleenvan der VeenVandersmissen, KevinKevinVandersmissenBoemmels, JuergenJuergenBoemmelsLuong, VihnVihnLuong2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25822Electrical verification of contact holes obtained with DSA of BCPProceedings paper