Hexagonal boron nitride nanowalls synthesized by unbalanced RF magnetron sputtering

BenMoussa, B.B.BenMoussaD'Haen, JanJanD'HaenBorschel, ChristianChristianBorschelSaitner, MarcMarcSaitnerSoltani, AliAliSoltaniMortet, VincentVincentMortetRonning, CarstenCarstenRonningD'Olieslaeger, MarcMarcD'OlieslaegerBoyen, Hans-GerdHans-GerdBoyenHaenen, KenKenHaenen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18553Hexagonal boron nitride nanowalls synthesized by unbalanced RF magnetron sputteringProceedings paper