El Otell, ZiadZiadEl OtellMarinov, DaniilDaniilMarinovSamra, VladimirVladimirSamraBowden, MarkMarkBowdende Marneffe, Jean-FrancoisJean-Francoisde MarneffeVerdonck, PatrickPatrickVerdonckBraithwaite, NicholasNicholasBraithwaite2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23790Development of a novel wafer probe for in-situ measurementsMeeting abstract