Electrical characterization of silicon-rich-oxide-based memory cells using pulsed current-voltage techniques

Rosmeulen, MaartenMaartenRosmeulenSleeckx, ErikErikSleeckxDe Meyer, KristinKristinDe Meyer2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6771Electrical characterization of silicon-rich-oxide-based memory cells using pulsed current-voltage techniquesProceedings paper