Garcia Bardon, MarieMarieGarcia BardonSherazi, YasserYasserSheraziSchuddinck, PieterPieterSchuddinckJang, DoyoungDoyoungJangYakimets, DmitryDmitryYakimetsDebacker, PeterPeterDebackerBaert, RogierRogierBaertMertens, HansHansMertensBadaroglu, MustafaMustafaBadarogluMocuta, AndaAndaMocutaHoriguchi, NaotoNaotoHoriguchiMocuta, DanDanMocutaRaghavan, PraveenPraveenRaghavanRyckaert, JulienJulienRyckaertVerkest, DiederikDiederikVerkestSteegen, AnAnSteegen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26640Extreme scaling enabled by 5 tracks cells : holistic design-device co-optimization for FinFETs and lateral nanowiresProceedings paper