Physics-informed deep learning approach for nanoindentation-based thin film analysis

Ozdemir, Yusuf BurakYusuf BurakOzdemirOkudur, Oguzhan OrkutOguzhan OrkutOkudurGonzalez, MarioMarioGonzalezMerckling, ClementClementMerckling2025-08-252025-08-252025-OCT0026-2714WOS:001551996400001https://imec-publications.be/handle/20.500.12860/46107Physics-informed deep learning approach for nanoindentation-based thin film analysisJournal article10.1016/j.microrel.2025.115875WOS:001551996400001MECHANICAL-PROPERTIESELASTIC-MODULUSYIELD STRENGTHINDENTATIONHARDNESSRELIABILITYBERKOVICHSUBSTRATEBEHAVIORLOAD