Effect of extreme surface roughness on the electrical characteristics of ultra-thin gate oxides

Houssa, MichelMichelHoussaNigam, TanyaTanyaNigamMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3522Effect of extreme surface roughness on the electrical characteristics of ultra-thin gate oxidesJournal article