Accuracy in APT analysis: The case of boron in silicon

Melkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannBogdanowicz, JanuszJanuszBogdanowiczMorris, RichardRichardMorrisVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28959Accuracy in APT analysis: The case of boron in siliconMeeting abstract