Bender, HugoHugoBenderRichard, OlivierOlivierRichardKundu, ParomitaParomitaKunduFavia, PaolaPaolaFaviaZhong, ZhichaoZhichaoZhongPalenstijn, Willem JanWillem JanPalenstijnBatenburg, Kees JoostKees JoostBatenburgWirix, MaartenMaartenWirixKohr, HolgerHolgerKohrSchoenmakers, RemcoRemcoSchoenmakers2021-10-272021-10-2720190268-1242https://imec-publications.be/handle/20.500.12860/32524Combined STEM-EDS tomography of nanowire structuresJournal articlehttps://doi.org/10.1088/1361-6641/ab4840